Text-only / Accessible Version Skip Navigation itchy MOLO

Jump to Activity:   

Search the Database:  

A Concord Consortium Project

Home >> Database >> Activities >> View

In the Database section: Introduction | Search | Browse

Activity Number
Overview and Learning Objectives
Classroom Practice
Central Concepts
Macro Micro Link
Activity Credits

Atomic Layer Deposition (A 1-page experiment)

Interactive model, with minimal support

Activity Screenshot

Go To Activity

Follow the link above to start or download this activity.

This Activity Requires:

      Test your system to see if it meets the requirements

Important! If you cannot launch anything from this database, please follow the step-by-step instructions on the software page.

Please Note: Many models are linked to directly from within the database. When an activity employs our scripting language, Pedagogica, as do some of the "guided" activities, the initial download may take several minutes. Subsequent activities will not take a long time. See this page for further instructions.

Overview and Learning Objectives

What affects the making of an atomic-scale film such as that used in the printing of circuitry? In this activity, students undertake a simulation of the Atomic Layer Deposition (ALD) technique, a CVD process in which two complementary precursors (e.g., Al(CH3)3 and H2O) are alternatively introduced into the reaction chamber, and build an atomic scale film.

Students will be able to:

  • manipulate the model in order to assemble an atomic-scale film;
  • experiment with temperature and discover its effect on irregularities in this process.

return to top

Classroom Practice

You might link the model to an animation of ALD as used in manufacturing: http://www.cambridgenanotech.com/animation/

return to top

Central Concepts

Key Concept:

Molecules can be layered on top of precursors to build up the thickness of a film useful in atomic-scale manufacturing.

Additional Related Concepts

return to top

Macro Micro Link

This nanoscale technique is useful in the printing of circuitry.

return to top

Activity Credits

using Molecular Workbench

return to top

Last Update: 12/07/2015 Maintainer: CC Web Team (webmaster@concord.org)
Document Options: Text-only / Accessible Version | Printable Version | E-mail this Page

Copyright © 2019, The Concord Consortium.
All rights reserved.

NSF Logo
These materials are based upon work supported
by the National Science Foundation under grant numbers
9980620, ESI-0242701 and EIA-0219345

Any opinions, findings, and conclusions or recommendations expressed in this
material are those of the author(s) and do not necessarily reflect
the views of the National Science Foundation.